Ürün özellikleri
| Öğe | Dizin | ||
| CF4， ％（V/V）≥ | 99.999 | 99.995 | 99,99 |
| N2， 10-6(V/V) ≤ | 4 | 20 | 40 |
| O2， 10-6(V/V) ≤ | 1 | 5 | 10 |
| CO2， 10-6(V/V) ≤ | 1 | 5 | 10 |
| CO, 10-6(V/V) ≤ | 0,3 | 0,5 | 1 |
| SF6， 10-6(V/V) ≤ | 1 | 1 | 5 |
| H2Ç, 10-6(V/V) ≤ | 1 | 5 | 10 |
| HF, 10-6(V/V) ≤ | 0,1 | 0,3 | 0,3 |
| TFC(CH2F2、CHF3,C2F3,C3F8), 10-6(V/V) ≤ | 1 | 10 | 30 |
| ppm (V/V) ≤ | 10 | 50 | 100 |
| Silindir No. | NOKTA/48,8 L | NOKTA/47L | 40L | 10L | 4L |
| Vana No. | CGA580, CGA590, CGA320, DISS716 | ||||
